Frequency Electronics, Inc., together with its subsidiaries, engages in the design, development, manufacture, marketing, and sale of precision time and frequency control products and components for ...
Abstract: The signal-to-noise ratio of optical emission spectroscopy (OES) data has decreased as the plasma etching process has advanced. As a result, not only the advanced endpoint detection method ...
Abstract: This paper introduces the precise phase extraction of synthetic wavelength ranging based on optical frequency comb by using I/Q (In-phase/Quadrature) demodulation algorithm. A synthetic ...